Updated: July 2002

1. Process

The poisonous gas exhausted by semiconductor manufacturing system is taken into Joy Clean by its blower. First of all, the powder generated by semiconductor manufacturing system is purged by the filter; second, the gas is separated from the powder; at last, the gas is absorbed by catalyzer layer and then released to atmosphere.

2. Performance

The system is available to atmosphere-pressure CVD system (VENTURI method)
The system measures only 1/5 in size comparing with HITHERTO method. (water scrubber method)
The system can control air-flow and pressure in precision with +/- 0.5% deviation.
The system can help you to deduce the powder density under TLV value in your works.
The system can treat powder over 0.15µm continuously with Long lifespan. Running cost will deduce to almost lowest.
It is possible to handle a good deal of air-flow.
Catalyze capacity of the system is over ten times higher than that of HITHERTO method.
Maintenance is very simple.
Use electricity as power source.
Can be running continuously for 24 hours, 365 days.

3. Principle

First, the poisonous gas is sucked into the system through the 2 kinds of filters by which the powder will be removed. At this time, by pressure control system, the filters are exchanged by 3 way-rotor-valve automatically and alternatively.
The filter can work continuously by cleaning of the rotor by punch-method.
After that, the gas is then sent to catalyzer tanks to make reaction before its releasing to surroundings.
It also can treat the wet poisonous gas by the standard process just after heating.

4. Maintenance and Care

We have maintenance group which can always meet the demands of users.
The system equips a lot of interlocks to give out various kinds of alarm to inform maintenance time. In addition, its operation condition can be grasped just by having a look at its graphical panel.

5. Economic Characteristics

The system can be settled at compact space. It can work continuously day and night, which makes the semi-conductor device also work without stopping.

6. Application Area

The system can be adoptable not only in the exhaust gas treatment process but also in every industrial circles for its united application in deodorizing area.

7. Waste Treatment

Our contracted industry-waste-treatment-company can handle the waste easily, certainly and safely.

8. Award

It received the 17th Government Minor Enterprise Department Officer Prize.

JC-300AF-S Flow Chart

JC-300AF-S