Updated: July 2002

As exhaust gas treatment facility for exhaust gas from metal surface treatment process and IC and semiconductor opto electronics production process, the best suiting treatment method can be selected from the following line-up, depending on the nature of exhaust gas and treatment target.

1. CMT series (utilizing MORETANA^® for the treatment of acid and alkali exhaust gas):

This series provides small size high efficiency gas scrubbers with a treatment capacity ranging from 1 to 1000m³/min. It is a small size, standardized version of MORETANA^® scrubber which was originally developed as a large size flue gas desulfurization equipment.
Since MORETANA^® is utilized in the absorbing section, the equipment has the following features.
1) High contact efficiency realizing high treatment performance.
2) Maintenance is rarely necessary because clogging does not occur due to no use of packing and spray. Even when exhaust gas contains dust and organic matter, there is no problem since any dust with 1µm or more in size can be removed.
3) The equipment can be built compactly because a high linear velocity of approx. 3 m/s.

2. FEP series (electric precipitator for the treatment of exhaust gas containing ultra fine dust and mist):

In addition to various acid content, extremely fine dust is discharged from some production processes in which CVD is involved. In that case, a scrubbing system combined with a wet electric precipitator is required to perfectly treat such type of exhaust gas.
Since a wet electric precipitator is utilized, the equipment has the following features.
1) Fine dust and mist can be efficiently removed.
2) Corrosive gas containing dust can also be dealt with.

3. FKK Wet Denitration Method (for the treatment of NOx gas):

This method is used in small size, high efficiency, wet oxidation-reduction denitration equipment developed for the treatment of NOx containing exhaust gas from metal (stainless and copper) pickling processes and silicon (for semiconductor production) pickling process. NOx concentration of the exhaust gas can be reduced from several thousands to 50 ppm or below. Through the use of special reducing agent (patent obtained), the improvement of treatment efficiency and the reduction of running cost have been realized.

4. Dry catalytic denitration method (for the treatment of NOx gas):

The method utilizes the same basic principal as that of flue gas denitration method. However, the denitration equipment using the method requires the pretreatment of raw exhaust gas containing acid and mist from production processes. The equipment is provided with the mechanism enabling the equipment to deal with large change in NOx concentration of raw exhaust gas. Due to its largest merit of not discharging wastewater, the method is often applied in small size equipment.